JPH0282039U - - Google Patents
Info
- Publication number
- JPH0282039U JPH0282039U JP16192488U JP16192488U JPH0282039U JP H0282039 U JPH0282039 U JP H0282039U JP 16192488 U JP16192488 U JP 16192488U JP 16192488 U JP16192488 U JP 16192488U JP H0282039 U JPH0282039 U JP H0282039U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tweezers
- pair
- moving
- semiconductor integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16192488U JPH0282039U (en]) | 1988-12-13 | 1988-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16192488U JPH0282039U (en]) | 1988-12-13 | 1988-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282039U true JPH0282039U (en]) | 1990-06-25 |
Family
ID=31445287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16192488U Pending JPH0282039U (en]) | 1988-12-13 | 1988-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282039U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011073875A (ja) * | 2009-10-02 | 2011-04-14 | Sharp Corp | 搬送方法 |
| CN107557746A (zh) * | 2016-07-01 | 2018-01-09 | 佳能特机株式会社 | 基板夹持装置、成膜装置及成膜方法 |
-
1988
- 1988-12-13 JP JP16192488U patent/JPH0282039U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011073875A (ja) * | 2009-10-02 | 2011-04-14 | Sharp Corp | 搬送方法 |
| CN107557746A (zh) * | 2016-07-01 | 2018-01-09 | 佳能特机株式会社 | 基板夹持装置、成膜装置及成膜方法 |
| KR20180003993A (ko) * | 2016-07-01 | 2018-01-10 | 캐논 톡키 가부시키가이샤 | 기판 협지 장치, 성막 장치 및 성막 방법 |
| JP2018003094A (ja) * | 2016-07-01 | 2018-01-11 | キヤノントッキ株式会社 | 基板挟持装置、成膜装置及び成膜方法 |
| CN107557746B (zh) * | 2016-07-01 | 2020-11-10 | 佳能特机株式会社 | 基板夹持装置、成膜装置及成膜方法 |